Neocera's Twelve Inch Chambers

 
  Neocera's Twelve-Inch Spherical Dual Beam Chamber is our third generation design for pulsed laser deposition, engineered based on the results of cooperative research and development with Oak Ridge National Laboratory and Los Alamos National Laboratory. State-of-the-art pulsed laser deposition is a dynamic thin film fabrication technique. By leveraging our years of experience, you will be making films instead of redesigning your chamber.

The Spherical Chamber was engineered to enable systematic tuning of deposition parameters while simplifying routine maintenance operations. Two perpendicular optical paths are completely unobstructed, from the quarts to the target, permitting unrestricted beam scanning and dual beam alignment. Ample access is provided for: mounting and demounting targets; adjusting the focal plane, checking the spot shape, size, position, and intensity, removing foreign matter, and general cleaning.

Most materials deposited in pulsed laser deposition chambers require substrates heated to high temperatures. Our spherical design provides for the maximum distance between heater and chamber, and the greatest natural cooling power that geometry can provide. Substrate heaters locate near the center of our sphere, increasing thermal homogeneity while reducing chamber wall heating. For most applications, external chamber cooling is not required. The 8” Substrate Heater Port provides ample area for heater support, power, and thermocouple feedthroughs and shutter.
Based on our experience, we know that plume shape, size, and chemistry are critically important for optimal depositions. Changes in the plume are often the first indication of target deterioration, optics deterioration, or beam deterioration. The 8” Top View Port on the pole of the chamber and 6” Side View Port on the equator provide an unobstructed, three-dimensional view of the entire deposition process. The plume can be continuously and completely monitored, both visually and spectrographically. The third Angled View Port is positioned to facilitate direct viewing of the mounted substrate, heater surface, and depositing film.

Two ports complete the chamber. The 8” Target Port is designed to mount our Target Rotator or Target Carrousel Assembly, and the 6” Rotatable Pumping Port can accommodate virtually any pumping stack desired.

The U.S. Government has approved Neocera’s vacuum chambers for use with ultraviolet laser beams. Neocera’s hardware meets or exceeds all international safety standards.