Neocera's Eighteen Inch Chamber

 
  Neocera's Eighteen-Inch Spherical Dual Beam Chamber provides more room for coating large area substrates than our 12” chamber. It also allows complementary technologies, such as sputtering, ion beam assist, and thermal evaporation, to be combined with state-of-the-art pulsed laser deposition. By leveraging our years of experience, you will be making films instead of redesigning our chamber.

The Spherical Chamber was engineered to enable systematic tuning of deposition parameters while simplifying routine maintenance operations. Two perpendicular optical paths are completely unobstructed, from the quartz to the target, permitting unrestricted beam scanning and dual beam alignment. Ample access is provided for: mounting and demounting targets, adjusting the focal plane, checking the spot shape, size, position, and intensity, removing foreign matter, and general cleaning.

Most materials deposited in pulsed laser deposition chambers require substrates heated to high temperatures. Our spherical design provides for the maximum distance between heater and chamber, and the greatest natural cooling power that geometry can provide. Substrate heaters locate near the center of our sphere, increasing thermal homogeneity while reducing chamber wall heating. For most applications, external chamber cooling is not required. The 10” Substrate Heater Port provides ample area for large area heaters. A 10”-to-8” adaptor flange is supplied so that heater assemblies on 8” flanges can be accommodated.

Based on our experience, we know that plume shape, size, and chemistry are critically important for optimal depositions. Changes in the plume are often the first indication of target deterioration, optics deterioration, or beam deterioration. The 10” Top View Port on the pole of the chamber (supplied with 10”-to-8” adaptor flange and 8” Pyrex® window) and 8” Side View Port on the equator (supplied with 8” Pyrex® window) provide an unobstructed, three-dimensional view of the entire deposition process. The plume can be continuously and completely monitored, both visually and spectrographically. The third Angled View Port is positioned to facilitate direct viewing of the mounted substrate, heater surface, and depositing film.

Two ports complete the chamber: a 10” Target Port (supplied with 10”-to-8” adaptor flange so that target assemblies on 8” flanges can be accommodated), and an 8” Rotatable Pumping Port which can accommodate virtually any pumping stack desired.

The U.S. Government has approved Neocera’s vacuum chambers for use with ultraviolet laser beams. Neocera’s hardware meets or exceeds all international safety standards.