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| Automated Target Holder
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| The Automated Target Carrousel was developed to leverage the
advantages offered by Pulsed Laser Deposition for producing multiplayer thin
film structures and superlattices. The carrousel is designed for use with
either Neoceras 12 or 18 dual beam pulsed laser deposition chambers
(please specify size when ordering). The entire component is designed to fit through an 8 nipple (5.8 clearance diameter) without disassembly. Larger flanges are priced on request. In our standard design, the inside edge of a 1 target locates along the flange center line providing a compromise between 1 and 2 targets and beams focused near the center line of the flange. For flanges larger than 8, the entire assembly can be moved laterally on the flange for custom beam focusing arrangements. Targets rotate continuously at 17 rpm with the standard ac motor. For variable angular velocities, an optional dc motor and speed controller (0-30 rpm) can be substituted upon initial purchase or as an upgrade for field installation. The automation package is designed for ease of use and reliable operation. The carrousel platter rotates via a welded bellows feedthrough under the control of a DC servomotor. A computer coordinates the position of the platter with the triggering of the laser. The user defines a layer of deposited material by specifying the desired number of counts (thickness) and triggering frequency for a given target. The user then programs any sequence of layers and repetitions to create a multilayer thin film structure. Dwell times may also be included to allow the chamber to return to a steady-state condition before the next layer is deposited. Entire routines are quickly input, tested, stored, and recalled with the user-friendly Windows-based software package, which provides a PLD control panel displaying the current layer number, the number of times the routine has executed, the carrousel location in degrees, and the status of the deposition. The target also may be rastered over its diameter for improved target erosion uniformity. The Automated Target Carrousel can accommodate six 1 diameter targets or three 2 diameter targets. Target thickness can range from foils a few mils thick to disks up to 0.3 thick. Since the targets are bonded to the target mounts, perimeter shape is not critical; squares work as well as circles. Each target can be located reproducibly to the focal plane by adjusting the position of a target collar. Targets can be mounted and demounted without removing the carrousel from the chamber. A stainless steel shield with beam aperture eliminated excessive carrousel heating and target cross-contamination. A complete carrousel enclosure and water-cooled shield are available as options. The unit is shipped complete with the Carrousel Flange Assembly, Control Electronics, an Interface Board for your computer, software, and all interconnection cabling. A trigger signal is provided on a BNC jack as part of the Control Electronics to fire your laser. UNIQUE FEATURES: DC servomotor, control electronics, and user-friendly, Windows-based software included in a complete automated multilayer package. Includes synchronous AC motor and planetary gearing for continuous target rotation Carrousels compact design fits on 8 flange. Lightweight assembly (about 8 kg fully assembled) is easy to mount on chamber. Targets can be mounted and de-mounted without removing carrousel from chamber. Targets up to 2 diameter and irregularly-shaped targets. OPTIONS & CUSTOMIZATIONS: User-specified and/or adjustable flange-to-focal-plane distance Larger flanges priced on request Customized electronics and software to control external events Variable speed dc motor and control for target drive Enclosure shield or water-cooled shield UHV compatibility |