| Heaters | Target Holders | Chambers |
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Many materials require careful control of the substrate temperature during pulsed laser deposition. Neocera’s substrate heaters provide uniform heating of the substrate, and can operate at high temperatures in a range of environments, from vacuum to oxygen. Conducting and radiant heaters are available. Neocera supplies the substrate heaters either as independent components, or as flange-mounted assemblies. The flange includes an electrical feedthrough and shutter assembly, which allows you to pre-ablate the target surface without depositing material on the substrate. Neocera also supplies a high-quality programmable temperature controller designed for our heaters. It comes with all the cabling you need, ready to operate on whatever line voltage you specify. |
To make high-quality films by pulsed laser deposition, the target should move relative to the laser spot to conserve material and preserve the deposition geometry. Neocera’s target holders accomplish this in several convenient ways. The simplest target holder spins a single target around its central axis, exposing a fresh surface to each pulse of the laser. Neocera also manufactures three types of carrousels that move multiple targets relative to the laser spot. You can choose manual or automated carrousels (automated carrousels come with a computer interface and software). The carrousels are designed to fabricate multilayer structures, or to deposit from multiple targets in rapid succession. |
Neocera offers vacuum chambers designed specifically for pulsed laser deposition. The chambers are compatible with Neocera’s target and substrate assemblies. The laser windows and viewports are positioned to provide the convenience and the versatility needed for PLD. We offer two standard size spherical chambers, 12 and 18 inches in diameter. The 12-inch chamber is ideal for making small area films by PLD. The 18-inch chamber provides more room for coating larger substrates, and for complementary technologies including sputtering, ion beam assist, and thermal evaporation. If you have special requirements, we will work with you to custom design a chamber specifically for your needs. |