Conducting Heaters
Neocera's Conducting Heater features:
- 950ºC, oxygen comatible, ±5ºC over 1.5” or 2.5” diameter
- Stability better than ±1ºC, and heat up time less than 5 minutes (with optional temperature controller).
- Rugged, protected external connectors including two thermocouple jacks and a three-wire power cord.
- Bench support stand for ex-situ substrate mounting and maintenance.
- Sturdy XYZ support structure providing four points of support on the flange.
- Integral shutter with welded bellows rotary feedthrough.
- Electrical: US and International standards available.
Options and Customizations:
- 3” vertial range of heater palne can be located at a user-specified distance from flange face.
- Larger or smaller flanges priced on request.
- Programmable autotunng PID temperature controller anf Phase Angle Firing power supply are available.
- A reversible AC motor or stepper motor can be supplied for automated applications.
The Substrate Heater Flange Assembly is a rugged vacuum component. In a pure oxygen ambient, it will attain and maintain 950ºC with temperature uniformity better than ±5ºC. Heaters are available in 2”, 3”, and 4” diameters, providing a uniform temperature over 1.5”, 2.5”, and 3.5” diameters, respectively.
The assembly is provided complete with 8” conflat flange, electrical power and thermocouple connections, Type K thermocouple, and includes a shutter mounted on a welded bellows rotary feedthrough. Other flange sizes can also be supplied.
In our standard design, the heater plane can be located between 6” and 9” from the flange face. Additionally, our sturdy heater support structure provides lateral adjustability. This true XYZ capability allows the substrate to be positioned precisely for your application.
Power and thermocouple cables connect to plugs on the flange exterior to facilitate removal from the chamber. A flange assembly stand is included so that substrates may be mounted and demounted in comfort at your laboratory bench.
An autotuning programmable temperature controller is available for profiled substrate temperature applications. The controller, when used with the heater, provides stability of betterh than ±1ºC. Integrated with our substrate heater, our package will provide accuracy and reproducibility to your most demanding heated substrate needs.
When connected to the temperature controller, Neocera’s heater ramps from room temperature to 800ºC, and stabilizes to ±1ºC, in less than 5 minutes. Cooling back down to room temperature takes about half an hour at atmospheric pressure.
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