Radiant Heaters
Neocera's Radiant Heater features:
- Substrate rotation provides better uniformity for large area films. If operated in conjunction with beam scanning, film thickness variations of <5% can be achieved.
- 90º design can be mounted on the top flange of a Neocera chamber. Using an optional rotating stage, the substrate can be turned to face load lock port and additional deposition sources.
- Load lock compatible (optional) spring-loaded susceptor plate allows for easy load lock transfer of substrates.
- Double-sided films can be produced by using the appropriate substrate carrier, preventing damage to the reverse side of the thin film.
- High deposition temperature. Maximum coil temperature is 1050ºC, maximum susceptor plate temperature is 850ºC.
- Shutter allows for pre-ablation of target before deposition.
- PID temperature controller (not shown) provides temperature stability better than ±1ºC and controls speed and direction of substrate rotation.
Options and customizations. Larger flanges available upon request. Straight or 90º configurations available.
The Rotating Substrate Heater Flange Assemblies are rugged vacuum components, using dependable technology comparable to Neocera’s popular Flat Plate Heaters. In a pure oxygen ambient, they will attain and maintain 850ºC on the susceptor plate with a temperature variation better than ±5ºC over their entire diameter. Heaters are available in 2” or 3” diameters. The assemblies are provided complete with an 8” knife-edge flange, electrical power, and thermocouple connections, two type K thermocouples and include a shutter mounted on a welded bellows rotary feedthrough. Other flange sizes can also be supplied.
The rotating susceptor plate is mounted to a shield tube, which rotates about the heater axis, preventing twisting of the electrical wires that power the heater. The rotation mechanism can be powered either with spur gears, offering substrate mounting parallel to the flange, or mitre gears, which permit substrate mounting perpendicular to the flange. Perpendicular mounting allows for rotation of the substrate to face multiple deposition sources and off-axis deposition.
An autotuning programmable controller is included which provides temperature stability of better than ±1ºC. The controller includes electronics to set the speed and direction of the substrates rotation. Integrated with our substrate heater, the package will provide accuracy and reproducibility to your most demanding substrate heater needs.
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