Neocera's Single-Target Holder
Neocera's Single Target Holder has several unique features:
- Targets can be mounted and demounted without removing rotator from chamber.
- Targets 4” in diameter and larger may be used.
- Irregularly shaped targets mount as easily as disks.
- Includes variable speed DC motor for adjustable target rotation speed.
- Maximum operating temperature exceeds 100ºC without water cooling.
- May be baked out to 450ºC
Options and Customizations:
- Enclosure shield or water-cooled shield
- User-specified flange-to-focal plane distance
- Larger and smaller flanges priced on request.
- UHV compatibility.
The Target Rotator Flange Assembly is a versatile vacuum component designed for use in Neocera’s 12” dual beam pulsed laser deposition chamber.
The rotator can accommodate targets as large as 4” diameter. Target thickness can range from foils a few mils thick to disks up to 0.3” thick. Since the target is bonded to the target mount, perimeter shape is not critical; squares work as well as circles. The target can be located reproducibly to the focal plane by adjusting the position of a target collar. Targets can be mounted and demounted without removing the rotator from the chamber.
A stainless steel shield with beam aperture eliminates excessive target heating. A complete enclosure or water-cooled shield are available as options.
Our standard rotator is designed with beam focal plane 4” from the flange face. Custom cantilever lengths can be accommodated easily.
The component is designed to fit through an 8” nipple (5.8” clearance diameter) without disassembly. Larger or smaller flanges are priced on request. In our standard design, the inside edge of a 2” target locates near the flange centerline.
The target rotates at 0 – 25 rpm with the standard variable speed dc motor and speed controller.
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