Neocera's Six-Target Holder
Neocera's Single Target Holder features several unique features:
- Targets can be mounted and demounted without removing carrousel from chamber.
- Targets 2” in diameter and larger may be used.
- Irregularly shaped targets mount as easily as disks.
- Carrousel “clicks” and locks into place when target is properly indexed.
- Includes reversible AC motor for continuous target rotation at 17 rpm.
- Compact design fits on 8” flange.
- Lightweight assembly (about 8 kg fully assembled) is easy to mount on chamber.
- Maximum operating temperature exceeds 100ºC without water cooling.
- May be baked out to 450ºC.
Options and customizations:
- Enclosure shield or water-cooled shield.
- User specified flange-to-focal plane distance
- Larger flanges priced on request
- Stepper motor, PC indexer, and software for automated carrousel applications
- Variable speed dc motor and control for target drive
- UHV compatibility
The Target Carrousel Flange Assembly is a versatile vacuum component designed for use in Neocera’s 12” dual beam pulsed laser deposition chamber.
The carrousel can accommodated six 1” diameter targets or three 2” diameter targets. Target thickness can range from foils a few mils thick to disks up to 0.3” thick. Since the targets are bonded to the target mounts, perimeter shape is not critical; squares work as well as circles. Each target can be located reproducibly to the focal plane by adjusting the position of a target collar. Targets can be mounted and demounted without removing the carrousel from the chamber. A stainless steel shield with beam aperture eliminated excessive carrousel heating and target cross-contamination. A complete carrousel enclosure or water-cooled shield are available as options.
Our standard carrousel is designed with beam focal plane 4” from the flange face. Custom cantilever lengths can be accommodated easily. The entire component is designed to fit through an 8” nipple (5.8” clearance diameter) without disassembly. Larger flanges are priced on request. In our standard design, the inside edge of a 1” target locates along the flange center line providing a compromise between 1” and 2” targets and beams focused near the center line of the flange.
For flanges larger than 8”, the entire assembly can be moved laterally on the flange for custom beam focusing arrangements. The standard carrousel is rotated with a manual feedthrough. A spring-loaded indexer provides positive tactile feedback assuring that each target is properly positioned. For automated target exchange, an automation package is available.
Targets rotate continuously at 17 rpm with the standard ac motor. For variable angular velocities, an optional dc motor and speed controller (0-30 rpm) can be substituted upon initial purchase or as an upgrade for field installation.
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